ISSUED PATENTS

[1] F. Ayazi, G. Piazza, R. Abdolvand, G.K. Ho, S. Humad, “Piezoelectric on semiconductor-on-insulator microelectromechanical resonators and methods of fabrication”, United States Patent 6,909,221, June 21, 2005.

[2] G.Piazza, P.J. Stephanou, A.P.Pisano, “Contour-Mode Piezoelectric Resonators”, United States Patent Application 20060290449, May 2006.

PATENT APPLICATIONS

[1] G. Piazza, N. Sinha, and R. Mahameed, “Piezoelectric AlN MEMS Switches MonolithicallyIntegrated with AlN Contour-Mode Resonators”.

[2] G. Piazza, A.T. Johnson, M. Rinaldi, C. Zuniga, M.Taheri, “System and Method for Detecting a Gaseous Analyte in a Gas”.

 

 

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